標題: Passivation of defects in a-Si : H TFTs with 150 degrees C supercritical fluids
作者: Yang, Po-Yu
Liu, Po-Tsun
Chang, Ting-Chang
Cheng, Yi-Li
光電工程學系
Department of Photonics
公開日期: 2007
摘要: In this study, the supercritical fluids act the transporter and deliver H2O molecule into the a-Si:H film for repairing defects. From experiment results, superior transfer characteristic is obtained after the treatment of supercritical fluids mixed with water and propyl-alcohol. Besides, density of states is also reduced significantly during this processing.
URI: http://hdl.handle.net/11536/9201
ISBN: 978-957-28522-4-8
期刊: IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007
起始頁: 500
結束頁: 502
顯示於類別:會議論文