標題: | Passivation of defects in a-Si : H TFTs with 150 degrees C supercritical fluids |
作者: | Yang, Po-Yu Liu, Po-Tsun Chang, Ting-Chang Cheng, Yi-Li 光電工程學系 Department of Photonics |
公開日期: | 2007 |
摘要: | In this study, the supercritical fluids act the transporter and deliver H2O molecule into the a-Si:H film for repairing defects. From experiment results, superior transfer characteristic is obtained after the treatment of supercritical fluids mixed with water and propyl-alcohol. Besides, density of states is also reduced significantly during this processing. |
URI: | http://hdl.handle.net/11536/9201 |
ISBN: | 978-957-28522-4-8 |
期刊: | IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007 |
起始頁: | 500 |
結束頁: | 502 |
顯示於類別: | 會議論文 |