微影步進機之IDM定位機構實作---子計畫III：加速規式之位置、磨擦力感測器在二維衝量馬達伺服控制中之應用(I)

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DC Field	Value	Language
dc.contributor.author	陳宗麟	en_US
dc.contributor.author	Chen Tsung-Lin	en_US
dc.date.accessioned	2014-12-13T10:33:21Z	-
dc.date.available	2014-12-13T10:33:21Z	-
dc.date.issued	2003	en_US
dc.identifier.govdoc	NSC92-2212-E009-025	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92012	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=877060&docId=168254	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	微影步進機之IDM定位機構實作---子計畫III：加速規式之位置、磨擦力感測器在二維衝量馬達伺服控制中之應用(I)	zh_TW
dc.title	2D Impact-Drive-Mechanism Drives Servo Control Using Accelerometer-Based Position Sensors and Friction Sensors (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程學系	zh_TW
Appears in Collections:	Research Plans

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