微影步進機之IDM定位機構實作---子計畫III：加速規式之位置、磨擦力感測器在二維衝量馬達伺服控制中之應用(I)

標題:	微影步進機之IDM定位機構實作---子計畫III：加速規式之位置、磨擦力感測器在二維衝量馬達伺服控制中之應用(I) 2D Impact-Drive-Mechanism Drives Servo Control Using Accelerometer-Based Position Sensors and Friction Sensors (I)
作者:	陳宗麟 Chen Tsung-Lin 國立交通大學機械工程學系
公開日期:	2003
官方說明文件#:	NSC92-2212-E009-025
URI:	http://hdl.handle.net/11536/92012 https://www.grb.gov.tw/search/planDetail?id=877060&docId=168254
Appears in Collections:	Research Plans

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