近場光聲顯微術在奈米尺度異結構殘留應力的量測研究(I)

Full metadata record

DC Field	Value	Language
dc.contributor.author	尹慶中	en_US
dc.contributor.author	YIN CHING-CHUNG	en_US
dc.date.accessioned	2014-12-13T10:34:03Z	-
dc.date.available	2014-12-13T10:34:03Z	-
dc.date.issued	2003	en_US
dc.identifier.govdoc	NSC92-2212-E009-026	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92479	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=863365&docId=164736	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	近場光聲顯微術在奈米尺度異結構殘留應力的量測研究(I)	zh_TW
dc.title	Determination of Residual Stresses in Nanometer Scale Heterosturctures Using Near-Field Photoacoustic Microscopy (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程學系	zh_TW
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