近場光聲顯微術在奈米尺度異結構殘留應力的量測研究(I)

標題:	近場光聲顯微術在奈米尺度異結構殘留應力的量測研究(I) Determination of Residual Stresses in Nanometer Scale Heterosturctures Using Near-Field Photoacoustic Microscopy (I)
作者:	尹慶中 YIN CHING-CHUNG 國立交通大學機械工程學系
公開日期:	2003
官方說明文件#:	NSC92-2212-E009-026
URI:	http://hdl.handle.net/11536/92479 https://www.grb.gov.tw/search/planDetail?id=863365&docId=164736
Appears in Collections:	Research Plans

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