具有低介電常數阻障介電薄膜製程整合之研究(I)

Full metadata record

DC Field	Value	Language
dc.contributor.author	施敏	en_US
dc.contributor.author	SZE SIMON MIN	en_US
dc.date.accessioned	2014-12-13T10:34:20Z	-
dc.date.available	2014-12-13T10:34:20Z	-
dc.date.issued	2002	en_US
dc.identifier.govdoc	NSC91-2215-E009-041	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92656	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=784393&docId=150767	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	具有低介電常數阻障介電薄膜製程整合之研究(I)	zh_TW
dc.title	Study on the Integration of Barrier Dielectric with Low Dielectric Constant (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子工程系	zh_TW
Appears in Collections:	Research Plans

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