具有低介電常數阻障介電薄膜製程整合之研究(I)

Title:	具有低介電常數阻障介電薄膜製程整合之研究(I) Study on the Integration of Barrier Dielectric with Low Dielectric Constant (I)
Authors:	施敏 SZE SIMON MIN 交通大學電子工程系
Issue Date:	2002
Gov't Doc #:	NSC91-2215-E009-041
URI:	http://hdl.handle.net/11536/92656 https://www.grb.gov.tw/search/planDetail?id=784393&docId=150767
Appears in Collections:	Research Plans

Files in This Item:

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.