漸變式光罩技術開發(I)

標題:	漸變式光罩技術開發(I) Development of Gray-Scale Masks and Their Applications for Hybrid Micro-Optical Components(I)
作者:	謝漢萍 SHIEH HAN-PING DAVID 交通大學電子與資訊研究中心
公開日期:	2002
官方說明文件#:	NSC91-2623-7009-013
URI:	http://hdl.handle.net/11536/92715 https://www.grb.gov.tw/search/planDetail?id=691993&docId=131552
Appears in Collections:	Research Plans

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