Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 陳智 | en_US |
| dc.contributor.author | Chen Chih | en_US |
| dc.date.accessioned | 2014-12-13T10:34:31Z | - |
| dc.date.available | 2014-12-13T10:34:31Z | - |
| dc.date.issued | 2002 | en_US |
| dc.identifier.govdoc | NSC91-AT-7009-001 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/92796 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=790590&docId=151837 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | ALD在Damascene銅製程應用之研究 | zh_TW |
| dc.type | Plan | en_US |
| dc.contributor.department | 交通大學材料科學與工程系 | zh_TW |
| Appears in Collections: | Research Plans | |
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