高速磁浮渦輪分子真空幫浦之開發(I)

Title:	高速磁浮渦輪分子真空幫浦之開發(I) The Development of High-Speed Magnetic-Bearing Suspended Turbo Molecular Pump (I)
Authors:	李安謙 LEE AN-CHEN 交通大學機械工程系
Issue Date:	2002
Gov't Doc #:	NSC91-2212-E009-044
URI:	http://hdl.handle.net/11536/92804 https://www.grb.gov.tw/search/planDetail?id=771004&docId=147389
Appears in Collections:	Research Plans

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