標題: | 垂直圓柱容器中向下強制氣流流過---水平加熱晶圓之渦旋流結構與相關熱傳特性研究(II) Mixed Convective Vortex Flow Structures and Associated Thermal Characteristics in a Downward Gas Flow over a Heated Wafer in a Cylindrical Chamber (II) |
作者: | 林清發 LIN TSING-FA 交通大學機械工程研究所 |
公開日期: | 2002 |
官方說明文件#: | NSC91-2212-E009-042 |
URI: | http://hdl.handle.net/11536/92857 https://www.grb.gov.tw/search/planDetail?id=750570&docId=142587 |
Appears in Collections: | Research Plans |
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