高效率能源技術研究發展計畫--潔淨室省能技術與半導體製程省能技術

Abstract

※關鍵詞：潔淨室廠務系統;半導體省能技術；潔淨室流場設計；低溫製程；低溫絕緣膜技 術；人才培訓班，學術研討會 本年度的研發項目為半導體低溫省能製程技術之研發與推廣，主要的計畫內容區分為應用技術的研究開發與應用技術的推廣二項性質。計畫目標與工作內容為： (1) 潔淨室送風系統與機台配置最佳化設計；污染物擴散之實驗建立 (2) 低溫製程之研發 (3) 低溫成長矽氧絕緣膜之高膜質化暨選擇性技術的探討與應用 (4) 12吋晶圓快速加熱薄膜成長均溫製程省能技術研發 (5) 能源人才培育/研討會 經由上述工作內容，期能建立半導體產業及相關部門之共通性節約能源技術，以提升能源使用效率；培育能源相關人才以擴大能源科技團隊。

Keywords:Energy Saving Technology for Semiconductor Manufacture Industry; Low temperature processing, Low temperature insulator film technology; Training courses, conference.

The purposes of this project in this year are Research and development of energy saving technology for semiconductor manufacture processes. (1)Numeriacal Analysis and Design Methodology for HVAC system and workstations in Clean room. (2)Development of low-temperature manufacturing process. (3)Development of quality and selection technology of Si-O dielectric films. (4)Development of temperature uniformity technology for 12-inch wafer in rapid thermal processing (RTP) (5)Semiconductor manufacturing energy-saving technology related training courses and conference.

In summary, through this "High-Efficiency Energy Technology Research and Development"project, some specific and substantial energy saving technologies can be developed for the semi-conductor and related industrial. In addition, the training of energy-related personnel for energy saving can aid Taiwan with enormous capacity of competition in the world of twenty-first century.