| 標題: | 複晶矽鍺與MILC在低溫複晶矽薄膜電晶體上之應用---總計畫(I) Poly-SiGe and MILC Technologies for Low Temperature TFT Application (I) |
| 作者: | 張俊彥 CHANG CHUN-YEN 國立交通大學電子工程學系 |
| 關鍵字: | 多晶矽鍺;MILC技術;低溫;薄膜電晶體;Poly SiGe;MILC technology;Low temperature;Thin film transistor (TFT) |
| 公開日期: | 2001 |
| 官方說明文件#: | NSC90-2215-E009-072 |
| URI: | http://hdl.handle.net/11536/93458 https://www.grb.gov.tw/search/planDetail?id=665718&docId=126378 |
| Appears in Collections: | Research Plans |
