精密超薄型薄膜製程之開發

標題:	精密超薄型薄膜製程之開發 A Development of the Precise Ultra Thin Membrane Process
作者:	黃宇中 HUANG YU-CHUNG 交通大學電子工程系
關鍵字:	薄膜製程;積體電路設計;Thin membrane process;Integrated circuit design
公開日期:	2001
官方說明文件#:	NSC90-2218-E009-023
URI:	http://hdl.handle.net/11536/93506 https://www.grb.gov.tw/search/planDetail?id=674301&docId=128528
Appears in Collections:	Research Plans

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