| 標題: | 垂直圓柱容器中向下強制氣流流過一水平加熱晶圓之渦旋流結構與相關熱傳特性研究(I) Mixed Convective Vortex Flow Structures and Associated Thermal Characteristics in a Downward Gas Flow over a Heated Wafer in a Cylindrical Chamber (I) |
| 作者: | 林清發 LIN TSING-FA 國立交通大學機械工程研究所 |
| 關鍵字: | 渦流;晶圓;熱傳遞;垂直圓柱容器;向下強制氣流;Vortex flow;Wafer;Heat transfer;Clindrical chamber;Downward gas flow |
| 公開日期: | 2001 |
| 官方說明文件#: | NSC90-2212-E009-059 |
| URI: | http://hdl.handle.net/11536/93566 https://www.grb.gov.tw/search/planDetail?id=645518&docId=121282 |
| Appears in Collections: | Research Plans |
- 垂直圓柱容器中向下強制氣流流過---水平加熱晶圓之渦旋流結構與相關熱傳特性研究(II) / 林清發;LIN TSING-FA
- Visualization of vortex flow patterns with a uniformly perforated showerhead in a model lamp heat, single-wafer thermal processor / Cheng, Tsung Chieh;Lin, Tsing Fa;Yang, Jung Yen;Jian, Sheng-Rui
- Visualization of mixed convective vortex rolls in an impinging jet flow of air through a cylindrical chamber / Cheng, TC;Chiou, PH;Lin, TF
- Suppression of buoyancy-driven vortex flow resulting from a low speed jet impinging onto a heated disk in a vertical cylinder by cylinder top tilting / Hsieh, JC;Cheng, CW;Lin, TF
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