300 mm 多腔製程設備之自動建模及最佳排程

Full metadata record

DC Field	Value	Language
dc.contributor.author	李安謙	en_US
dc.contributor.author	LEE AN-CHEN	en_US
dc.date.accessioned	2014-12-13T10:35:58Z	-
dc.date.available	2014-12-13T10:35:58Z	-
dc.date.issued	2001	en_US
dc.identifier.govdoc	NSC90-2212-E009-066	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93683	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=645542&docId=121289	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	自動建模	zh_TW
dc.subject	排程	zh_TW
dc.subject	晶圓製程	zh_TW
dc.subject	生產管制	zh_TW
dc.subject	Automatic modeling	en_US
dc.subject	Scheduling	en_US
dc.subject	Wafer process	en_US
dc.subject	Production control	en_US
dc.title	300 mm 多腔製程設備之自動建模及最佳排程	zh_TW
dc.title	Automatic Modeling and Optimal Scheduling of Cluster Tool for 300mm Wafers	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程學系	zh_TW
Appears in Collections:	Research Plans

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