電子束石版術中蒙地卡羅模擬程式之發展

標題:	電子束石版術中蒙地卡羅模擬程式之發展 Development of Monte Carlo Simulation Program in Electron Beam Lithography
作者:	郭雙發國立交通大學電子工程學系
公開日期:	2000
官方說明文件#:	NSC89-2215-E009-096
URI:	http://hdl.handle.net/11536/93870 https://www.grb.gov.tw/search/planDetail?id=583860&docId=109699
Appears in Collections:	Research Plans

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