标题: | Surface morphological and nanomechanical properties of PLD-derived ZnO thin films |
作者: | Jian, Sheng-Rui Teng, I-Ju Yang, Ping-Feng Lai, Yi-Shao Lu, Jian-Ming Chang, Jee-Gong Ju, Shin-Pon 材料科学与工程学系 Department of Materials Science and Engineering |
关键字: | ZnO;PLD;AFM;nanoindentation;nanoscratch;hardness |
公开日期: | 1-五月-2008 |
摘要: | This study reports the surface roughness and nanomechanical characteristics of ZnO thin films deposited on the various substrates, obtained by means of atomic force microscopy (AFM), nanoindentation and nanoscratch techniques. ZnO thin films are deposited on (a- and c-axis) sapphires and (0001) 6H-SiC substrates by using the pulsed-laser depositions (PLD) system. Continuous stiffness measurements (CSM) technique is used in the nanoindentation tests to determine the hardness and Young's modulus of ZnO thin films. The importance of the ratio (H/E-film) of elastic to plastic deformation during nanoindentation of ZnO thin films on their behaviors in contact-induced damage during fabrication of ZnO-based devices is considered. In addition, the friction coefficient of ZnO thin films is also presented here. |
URI: | http://dx.doi.org/10.1007/s11671-008-9134-4 http://hdl.handle.net/11536/9391 |
ISSN: | 1931-7573 |
DOI: | 10.1007/s11671-008-9134-4 |
期刊: | NANOSCALE RESEARCH LETTERS |
Volume: | 3 |
Issue: | 5 |
起始页: | 186 |
结束页: | 193 |
显示于类别: | Articles |
文件中的档案:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.