標題: | Nanoindentation pop-in effects of Bi2Te3 thermoelectric thin films |
作者: | Jian, Sheng-Rui Tasi, Cheng-Hsun Huang, Shiau-Yuan Luo, Chih-Wei 電子物理學系 Department of Electrophysics |
關鍵字: | Bi2Te3 thin films;PLD;Pop-in;Nanoindentation;Hardness |
公開日期: | 15-二月-2015 |
摘要: | The structural, surface morphological and nanomechanical characteristics of Bi2Te3 thin films are investigated by means of X-ray diffraction (XRD), atomic force microscopy (AFM) and nanoindentation techniques. The Bi2Te3 thin films are deposited on c-plane sapphire substrates using pulsed laser deposition (PLD). The XRD result showed that Bi2Te3 thin film had a c-axis preferred orientation and a smoother surface feature from AFM observation. Nanoindentation results exhibit the discontinuities (so-called multiple "pop-ins" event) in the loading segments of the load-displacement curves, indicative of the deformation behavior in the hexagonal-structured Bi2Te3 thin film is the nucleation and propagation of dislocations. Based on this scenario, an energetic estimation of nanoindentation-induced dislocation resulted from pop-in effects is made. Furthermore, the hardness and Young\'s modulus of Bi2Te3 thin films were measured by a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) mode. The obtained values of the hardness and Young\'s modulus are 5.7 +/- 0.8 GPa and 158.6 +/- 6.2 GPa, respectively. (C) 2014 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.jallcom.2014.10.133 http://hdl.handle.net/11536/124024 |
ISSN: | 0925-8388 |
DOI: | 10.1016/j.jallcom.2014.10.133 |
期刊: | JOURNAL OF ALLOYS AND COMPOUNDS |
Volume: | 622 |
起始頁: | 601 |
結束頁: | 605 |
顯示於類別: | 期刊論文 |