標題: Nanoindentation pop-in effects of Bi2Te3 thermoelectric thin films
作者: Jian, Sheng-Rui
Tasi, Cheng-Hsun
Huang, Shiau-Yuan
Luo, Chih-Wei
電子物理學系
Department of Electrophysics
關鍵字: Bi2Te3 thin films;PLD;Pop-in;Nanoindentation;Hardness
公開日期: 15-二月-2015
摘要: The structural, surface morphological and nanomechanical characteristics of Bi2Te3 thin films are investigated by means of X-ray diffraction (XRD), atomic force microscopy (AFM) and nanoindentation techniques. The Bi2Te3 thin films are deposited on c-plane sapphire substrates using pulsed laser deposition (PLD). The XRD result showed that Bi2Te3 thin film had a c-axis preferred orientation and a smoother surface feature from AFM observation. Nanoindentation results exhibit the discontinuities (so-called multiple "pop-ins" event) in the loading segments of the load-displacement curves, indicative of the deformation behavior in the hexagonal-structured Bi2Te3 thin film is the nucleation and propagation of dislocations. Based on this scenario, an energetic estimation of nanoindentation-induced dislocation resulted from pop-in effects is made. Furthermore, the hardness and Young\'s modulus of Bi2Te3 thin films were measured by a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) mode. The obtained values of the hardness and Young\'s modulus are 5.7 +/- 0.8 GPa and 158.6 +/- 6.2 GPa, respectively. (C) 2014 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.jallcom.2014.10.133
http://hdl.handle.net/11536/124024
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2014.10.133
期刊: JOURNAL OF ALLOYS AND COMPOUNDS
Volume: 622
起始頁: 601
結束頁: 605
顯示於類別:期刊論文