標題: | Nanoindentation of Bi2Se3 Thin Films |
作者: | Lai, Hong-Da Jian, Sheng-Rui Tuyen, Le Thi Cam Phuoc Huu Le Luo, Chih-Wei Juang, Jenh-Yih 材料科學與工程學系 電子物理學系 Department of Materials Science and Engineering Department of Electrophysics |
關鍵字: | Bi2Se3 thin films;nanoindentation;hardness;pop-in |
公開日期: | 1-十月-2018 |
摘要: | The nanomechanical properties and nanoindentation responses of bismuth selenide (Bi2Se3) thin films are investigated in this study. The Bi2Se3 thin films are deposited on c-plane sapphire substrates using pulsed laser deposition. The microstructural properties of Bi2Se3 thin films are analyzed by means of X-ray diffraction (XRD). The XRD results indicated that Bi2Se3 thin films are exhibited the hexagonal crystal structure with a c-axis preferred growth orientation. Nanoindentation results showed the multiple pop-ins displayed in the loading segments of the load-displacement curves, suggesting that the deformation mechanisms in the hexagonal-structured Bi2Se3 films might have been governed by the nucleation and propagation of dislocations. Further, an energetic estimation of nanoindentation-induced dislocation associated with the observed pop-in effects was made using the classical dislocation theory. |
URI: | http://dx.doi.org/10.3390/mi9100518 http://hdl.handle.net/11536/148375 |
ISSN: | 2072-666X |
DOI: | 10.3390/mi9100518 |
期刊: | MICROMACHINES |
Volume: | 9 |
顯示於類別: | 期刊論文 |