標題: Nanoindentation of Bi2Se3 Thin Films
作者: Lai, Hong-Da
Jian, Sheng-Rui
Tuyen, Le Thi Cam
Phuoc Huu Le
Luo, Chih-Wei
Juang, Jenh-Yih
材料科學與工程學系
電子物理學系
Department of Materials Science and Engineering
Department of Electrophysics
關鍵字: Bi2Se3 thin films;nanoindentation;hardness;pop-in
公開日期: 1-十月-2018
摘要: The nanomechanical properties and nanoindentation responses of bismuth selenide (Bi2Se3) thin films are investigated in this study. The Bi2Se3 thin films are deposited on c-plane sapphire substrates using pulsed laser deposition. The microstructural properties of Bi2Se3 thin films are analyzed by means of X-ray diffraction (XRD). The XRD results indicated that Bi2Se3 thin films are exhibited the hexagonal crystal structure with a c-axis preferred growth orientation. Nanoindentation results showed the multiple pop-ins displayed in the loading segments of the load-displacement curves, suggesting that the deformation mechanisms in the hexagonal-structured Bi2Se3 films might have been governed by the nucleation and propagation of dislocations. Further, an energetic estimation of nanoindentation-induced dislocation associated with the observed pop-in effects was made using the classical dislocation theory.
URI: http://dx.doi.org/10.3390/mi9100518
http://hdl.handle.net/11536/148375
ISSN: 2072-666X
DOI: 10.3390/mi9100518
期刊: MICROMACHINES
Volume: 9
顯示於類別:期刊論文