標題: Nanomechanical properties and fracture toughness of Bi3Se2Te thin films grown using pulsed laser deposition
作者: Phuoc Huu Le
Luo, Chih-Wei
Jian, Sheng-Rui
Lin, Ting-Chun
Yang, Ping-Feng
電子物理學系
Department of Electrophysics
關鍵字: Thin films;Nanoindentation;Mechanical properties;Fracture
公開日期: 1-十月-2016
摘要: Mechanical properties of thermoelectric (TE) materials are crucial for fabricating efficient and endurable TE devices. In this study, polycrystalline Bi3Se2Te thin films are grown on c-plane sapphire substrates at 250 degrees C and helium gas pressure of 6.5 x 10(-1) Torr using pulsed laser deposition (PLD). The structural, compositional, morphological and mechanical properties of Bi3Se2Te thin films are studied. The Bi3Se2Te thin films are highly c-axis oriented structure and exhibit the stoichiometric compositions of Bi3Se2Te phase. The hardness and Young\'s modulus of the Bi3Se2Te thin films are 5.6 +/- 0.2 GPa and 197.2 +/- 5.4 GPa, respectively, which determined by nanoindentation tests with the continuous stiffness measurement (CSM) mode. The true hardness of the Bi3Se2Te thin films is also calculated using the energy principle of nanoindentation contact. The micro-Vicker indentation-induced fracture behavior of the Bi3Se2Te thin films is observed and discussed. (C) 2016 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.matchemphys.2016.07.006
http://hdl.handle.net/11536/134215
ISSN: 0254-0584
DOI: 10.1016/j.matchemphys.2016.07.006
期刊: MATERIALS CHEMISTRY AND PHYSICS
Volume: 182
起始頁: 72
結束頁: 76
顯示於類別:期刊論文