應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度

Full metadata record

DC Field	Value	Language
dc.contributor.author	陳俊勳	en_US
dc.contributor.author	CHIUN-HSUNCHEN	en_US
dc.date.accessioned	2014-12-13T10:36:30Z	-
dc.date.available	2014-12-13T10:36:30Z	-
dc.date.issued	2000	en_US
dc.identifier.govdoc	NSC89-2212-E009-024	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93982	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=501393&docId=90414	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	直接模擬蒙地卡羅法	zh_TW
dc.subject	銅化學氣相沈積	zh_TW
dc.subject	渠溝	zh_TW
dc.subject	DSMC method	en_US
dc.subject	Cu chemical vapor deposition	en_US
dc.subject	Trench	en_US
dc.title	應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度	zh_TW
dc.title	Using DSMC to Simulate Thermal-Flow Field on Deep Naro-meter Trench for Cu-CVD	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學機械工程系	zh_TW
Appears in Collections:	Research Plans

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