積體電路化學品與材料之開發---子計畫I：超微細Al/sub 2/O/sub 3/及Y-PSZ粉末之合成及其化學機械研磨劑之製備(II)

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DC Field	Value	Language
dc.contributor.author	涂肇嘉	en_US
dc.date.accessioned	2014-12-13T10:36:49Z	-
dc.date.available	2014-12-13T10:36:49Z	-
dc.date.issued	1999	en_US
dc.identifier.govdoc	NSC88-CPC-E009-009	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/94190	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=461621&docId=84633	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	超微粒	zh_TW
dc.subject	氧化鋁	zh_TW
dc.subject	化學機械拋光	zh_TW
dc.subject	Ultrafine particle	en_US
dc.subject	Alumina	en_US
dc.subject	Chemical mechanical polishing	en_US
dc.title	積體電路化學品與材料之開發---子計畫I：超微細Al/sub 2/O/sub 3/及Y-PSZ粉末之合成及其化學機械研磨劑之製備(II)	zh_TW
dc.title	The Syntheses of Ultrafine Al/sub 2/O/sub 3/ and Y-PSZ Powders and the Preparation of Related Chemical Mechanical Polishing Slurries (II)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學材料科學與工程研究所	zh_TW
Appears in Collections:	Research Plans

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