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dc.contributor.author葉清發en_US
dc.date.accessioned2014-12-13T10:37:05Z-
dc.date.available2014-12-13T10:37:05Z-
dc.date.issued1999en_US
dc.identifier.govdocNSC88-2215-E009-056zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/94366-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=444150&docId=80429en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.subject複晶矽薄膜電晶體zh_TW
dc.subject陽極氧化zh_TW
dc.subject鋁閘極zh_TW
dc.subject複晶矽氧化膜zh_TW
dc.subject氧化鋁zh_TW
dc.subjectPolysilicon TFTen_US
dc.subjectAnodic oxidationen_US
dc.subjectAl gateen_US
dc.subjectPolysilicon oxideen_US
dc.subjectAl2O3en_US
dc.title製作低溫(450℃)鋁閘極複晶矽薄膜電晶體之相關技術開發---鋁閘極複晶矽薄膜電晶體關鍵技術---Poly-Oxide及Al/sub 2/O/sub 3/之研究與應用(I)zh_TW
dc.titleStudy and Application of Poly-Oxide and Al/sub 2/O/sub 3/---Key Technology of Aluminum-Gate Polysilicon Thin-Film Transistors (I)en_US
dc.typePlanen_US
dc.contributor.department交通大學電子工程系zh_TW
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