完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chang, Kow-Ming | en_US |
dc.contributor.author | Chao, Kuo-Yi | en_US |
dc.contributor.author | Lin, Kun-Feng | en_US |
dc.date.accessioned | 2014-12-08T15:12:26Z | - |
dc.date.available | 2014-12-08T15:12:26Z | - |
dc.date.issued | 2008-03-28 | en_US |
dc.identifier.issn | 0925-4005 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1016/j.snb.2007.10.047 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/9553 | - |
dc.description.abstract | As micrototal analysis system (mu-TAS) becoming more extensively used, techniques for fabricating microchannels, microactuators, and measuring systems are becoming increasingly important. This study describes a novel method for fabricating a closed microchannel that can be used to measure the pico-scale flow rate of a liquid solution with an accuracy of better than 1 pL/s. The flow rate of 9 pL/s is calculated from the measurements. Without any high temperature or high-voltage processing, the microchannel can be integrated in the complementary metal-oxide-semiconductor (CMOS) microfluidic system and the fabricating process involves only some standard CMOS processes and common materials. The batch fabrication of a single integrated circuit (IC) chip is essential to reaching the goal of a system in one chip. (C) 2007 Elsevier B.V. All rights reserved. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | microchannel | en_US |
dc.subject | pico-liter | en_US |
dc.subject | sacrificial layer | en_US |
dc.subject | measuring | en_US |
dc.subject | HDP-RIE | en_US |
dc.title | A novel technique for measuring pico-scale flow rate of a liquid solution using a microchannel | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/j.snb.2007.10.047 | en_US |
dc.identifier.journal | SENSORS AND ACTUATORS B-CHEMICAL | en_US |
dc.citation.volume | 130 | en_US |
dc.citation.issue | 2 | en_US |
dc.citation.spage | 943 | en_US |
dc.citation.epage | 946 | en_US |
dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
dc.identifier.wosnumber | WOS:000255107700052 | - |
dc.citation.woscount | 1 | - |
顯示於類別: | 期刊論文 |