完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.author | 羅正忠 | en_US |
| dc.date.accessioned | 2014-12-13T10:39:06Z | - |
| dc.date.available | 2014-12-13T10:39:06Z | - |
| dc.date.issued | 1996 | en_US |
| dc.identifier.govdoc | NSC85-2215-E009-030 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/96074 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=234537&docId=43046 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 微機電系統 | zh_TW |
| dc.subject | 微感測器 | zh_TW |
| dc.subject | 微致動器 | zh_TW |
| dc.subject | 微元件 | zh_TW |
| dc.subject | MEMS | en_US |
| dc.subject | Micromaching | en_US |
| dc.subject | Microsensor | en_US |
| dc.subject | Microactuator | en_US |
| dc.subject | Microdevice | en_US |
| dc.title | 微機電系統校際整合研究---子計畫二：微小機電材料與製程技術發展與研究 | zh_TW |
| dc.title | Micro-Electro-Mechanical Material and Processes Development and Research | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學電子工程學系 | zh_TW |
| 顯示於類別： | 研究計畫 | |
