Title: 高均勻載子移動率之低溫複晶矽薄膜電晶體研製
Fabrication of Uniform and High Mobility Low Temperaturepoly-Si TFTs
Authors: 鄭晃忠
CHENG HUANG-CHUNG
國立交通大學電子工程學系
Keywords: 多晶矽;低溫;載子移動率;薄膜電晶體;Poly-silicon;Low temperature;Carrier mobility;Thin film transistor (TFT)
Issue Date: 2001
Gov't Doc #: NSC90-2215-E009-068
URI: http://hdl.handle.net/11536/96498
https://www.grb.gov.tw/search/planDetail?id=665703&docId=126374
Appears in Collections:Research Plans


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