多晶矽奈米線場效電晶體後製程於生醫感測之應用

Abstract

早期疾病檢測及即時監測，是改善醫療品質所面臨主要的挑戰之一。本計畫整合近代電 子科技、生物分子檢測技術以及矽奈米線場效電晶體，研發一套易於操作，並具有超高 靈敏度、免標定且即時感測之分子檢測平台。為達成此目標需完成兩項關鍵技術；一為 建立最佳化臨床樣品製備流程，並持續改善矽奈米線場效電晶之感測靈敏度與穩定性； 二為元件後製程，於奈米線表面進行修飾，並建立專一生物分子檢測探針，不但可達到 高靈敏度與高專一性的檢測，同時可避免非專一性其他物質之干擾。本計畫整合台灣與 日本團隊在元件製程與後修飾互補的專長，共同開發多晶矽奈米線場效電晶體於生醫感 測之應用。台灣團隊將進行設計與製作高靈敏度且穩定之矽奈米線場效電晶體，並藉由 製程參數之最佳化，以建立一套矽奈米線場效電晶體生物感測模式。日本團隊將開發針 對二氧化矽表面做修飾之蛋白質適體(aptamer)，固定化專一性分子(如抗體，DNA或RNA) 探針，並預防非專一性之分子作用。本計畫將使用流感病毒為檢測標的，未來將持續發 展相容於臨床檢驗之方法，針對矽奈米線場效電晶體研發一套專屬的量測儀器。本計畫 所研發之矽奈米線場效電晶體與現階段商用半導體製程相容，具有可大量製備之特點。 我們將應用商用元件包含電子迴路，如圖形使用者介面於系統之整合，研發一套易於操 作之儀器，並持續研發可攜式檢測儀器，以為未來商業化產品開發之基礎。

The development of a diagnostic platform that facilitates ultra-high sensitivity, label-free and real-time detection of biologically important events is proposed. This platform integrates modern electronics, molecular diagnosis and silicon nanowire field effect transistor (SiNW FET) to produce an easy to use biosensing system. Two key issues for the practical application of SiNW FET in biomedical fields are to prepare biocompatible devices with high stability while maintain their ultrahigh sensitivity and to modify the device for highly specific identification target bio-molecules without other ambiguous interference. The goal of this proposal is to integrate expertise from Taiwan and Japanese teams, device fabrication and post-fabrication surface modification, to prepare SiNW FET ready for further biomedical applications. Taiwan team will design and fabricate the sensitive and stable SiNW FET by optimizing the process parameters and building a SiNW FET biosensing model. Japanese team will focus on selective and efficient delivery of bio-sensing molecules, such as antibodies, probe-DNA, probe-RNA on to the SiNW channel of SiNW FET by making use of aptamer peptide to enhance the sensing properties on SiNW FET sensing system. Influenza virus will be used as sensing target in this study. The fabrication of SiNW FET is compatible with current commercial semiconductor process and can be mass produced when it is needed. In the future, the efficacy of SiNW FET biosensing platform will be tested with synthetic target as well as biological and clinical samples. The final goal is to put together a stand along instrument that takes advantage of the properties of SNW FET for biomedical diagnosis.