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Enhanced performance and reliability for solid-phase crystallized poly-Si TFTs with argon ion implantation (vol 154, pg J375, 2007)
Enhanced performance and reliability for solid-phase crystallized poly-Si TFTs with argon ion implantation (vol 154, pg J375, 2007)
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000251906800081.pdf
(33.67 KB)
Date
2008
Authors
Chang, Chia-Wen
Deng, Chih-Kang
Chang, Che-Lun
Lei, Tan-Fu
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Volume Title
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DOI
10.1149/1.2821307
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URI
http://dx.doi.org/10.1149/1.2821307
https://ir.lib.nycu.edu.tw/handle/11536/9979
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