Enhanced performance and reliability for solid-phase crystallized poly-Si TFTs with argon ion implantation (vol 154, pg J375, 2007)

Title:	Enhanced performance and reliability for solid-phase crystallized poly-Si TFTs with argon ion implantation (vol 154, pg J375, 2007)
Authors:	Chang, Chia-Wen Deng, Chih-Kang Chang, Che-Lun Lei, Tan-Fu 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	2008
URI:	http://hdl.handle.net/11536/9979 http://dx.doi.org/10.1149/1.2821307
ISSN:	0013-4651
DOI:	10.1149/1.2821307
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	155
Issue:	2
Begin Page:	S4
End Page:	S4
Appears in Collections:	Articles

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