PECVD設備應用光電膜性能提昇研究

Abstract

行政院在2005年召開會議，探討軟性電子的發展，期望在2015年我國軟性電子產值佔全球市場20%，並能產生15家以軟性電子產品為主的公司，分佈在基板、材料、設備、元件系統、應用服務等五個領域。在2006年則擬定產業技術整合策略及行動方案，建立產、學、研共同研發平台，引進國外專家與人才，掌握上游基礎材料與智權；突破過去以製造為主之發展模式，進行垂直整合帶動相關材料、設備與量測技術之發展，建構完整產業鏈。軟性電子中目前以塑膠基板和可撓式不鏽鋼基板最為常見，然而塑膠基板在製程上有溫度的限制及元件穩定性等問題；相較之下可撓式不鏽鋼基板耐熱性高適用於Roll-to-Roll製程，更有利於推廣至商業化產品上。加上近年太陽能源備受矚目，因此如何製備適用於薄膜太陽能電池之具光滯留絨面結構之可撓式不銹鋼基板，已成為國內目前太陽光電產業所需要解決的問題。 本計畫將擬與核能研究所(INER)共同合作研究，運用INER電漿鍍膜技術於不鏽鋼薄片基板上所開發具光滯留絨面結構之掺鋁氧化鋅(AZO)，結合交大現有PECVD製作氫化非晶矽薄膜太陽能電池沉積技術，以探討不同絨面結構(textured)之不鏽鋼基板對太陽光吸收膜之階梯覆蓋率(Step Coverage)、光反射率、電池轉換效率等光電特性之影響，最後再與核研所具絨面結構之AZO玻璃基板合成太陽能電池之特性相互比較，以評估INER之textured AZO不鏽鋼基板，應用於國內綠色產業的潛力，並開發出最佳的textured AZO不鏽鋼基板，以期將技術導入國內產業提昇競爭力。

In 2005, the Exective Yuan of the Republic of China convened a conference, which was related to the developments of flexible electronics. The flexible electronics industry is expected to occupy 20% global market and promote 15 companies, distributing over 5 fields such as substrate, materials, equipment, device system, applied services. In 2006, the government drafted an industrial strategy and a plan to build the panel for cooperation research, to induce masters and scientists. In Addition, the industry must dominate the upper streams and patents to establish completed industrial chain. In common, the plastic substrates and stainless steel substrates are all applied in flexible electronics. However, there are two key problems such as process temperature and stability in the devices based on plastic substrates. On the contrary, the stainless steel substrates are more suitable for flexible electronics and proper to Roll-to-Roll process. In recent years, to grow good devices on such TCO-covered stainless steel substrates with high optical and electrical quality is one of the key issues for the flexible thin-film solar cell applications. We will collaborate with the Institute of Nuclear Energy Research (INER) and use plasma technique to develop TCO flexible stainless steel substrates. Then, we will integrate our thin-film deposition technology to grow hydrogenated amorphous silicon (a-Si:H) films on TCO-covered flexible substrates. By varying the process conditions, and texturing on flexible substrates, we plan to study their effect on the silicon thin films in terms of their optical, and electrical properties for the solar cell application. Further we will also compare and contrast with the results using TCO-covered flexible stainless steel, TCO glass substrates in order to optimize the textured-TCO deposition. The potential of the textured-TCO films prepared at the INER on stainless steel substrates for the solar energy industrial application will be evaluated.