矽晶絕緣層之雷射超音波檢測及評估

Date

Authors

YIN CHING-CHUNG

Keywords

雷射超音波 , 矽晶絕緣 , 破壞韌性 , 聲射 , Laser induced ultrasound , Silicon on insulator , Fracture toughness Acoustic emission

URI

https://www.grb.gov.tw/search/planDetail?id=501413&docId=90420
https://ir.lib.nycu.edu.tw/handle/11536/102137

Collections

研究計畫;;Research Plans