Back-gate bias effect on nanosheet hybrid P/N channel of junctionless thin-film transistor with increased I-on versus decreased I-off

Abstract

A hybrid P/N channel junctionless (JL) thin-film transistor (TFT) with back-gate bias (V-bg) has been demonstrated. By applying negative bias of V-bg = -8V in gate length of 50 nm shows excellent SS (<90 mV/dec), a negligible drain induced barrier lowering (DIBL), increased I-on versus decreased I-off (ratio > 10(8)), and high V-th modulation. The increased I-on simultaneously decreased I-off via negative V-bg is attributed to smaller surface E-field at ON-state, significantly reducing the impact on interface traps and thinner effective channel thickness at OFF-state, improving gate controllability. Hence, hybrid P/N JL-TFT with V-bg is a promising for low power circuit, power management, and System-on-Chip applications. (C) 2015 AIP Publishing LLC.