THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS
| dc.citation.epage | 902 | en_US |
| dc.citation.issue | 4 | en_US |
| dc.citation.spage | 897 | en_US |
| dc.citation.volume | 131 | en_US |
| dc.citation.woscount | 28 | |
| dc.contributor.author | LU, NCC | en_US |
| dc.contributor.author | LU, CY | en_US |
| dc.contributor.author | LEE, MK | en_US |
| dc.contributor.author | SHIH, CC | en_US |
| dc.contributor.author | WANG, CS | en_US |
| dc.contributor.author | REUTER, W | en_US |
| dc.contributor.author | SHENG, TT | en_US |
| dc.contributor.department | 電控工程研究所 | zh_TW |
| dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:06:17Z | |
| dc.date.available | 2014-12-08T15:06:17Z | |
| dc.date.issued | 1984 | en_US |
| dc.identifier.issn | 0013-4651 | en_US |
| dc.identifier.journal | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/4870 | |
| dc.identifier.wosnumber | WOS:A1984SL25600042 | |
| dc.language.iso | en_US | en_US |
| dc.title | THE EFFECT OF FILM THICKNESS ON THE ELECTRICAL-PROPERTIES OF LPCVD POLYSILICON FILMS | en_US |
| dc.type | Article | en_US |