Hafnium silicate nanocrystal memory using sol-gel-spin-coating method

Abstract

The authors fabricate the hafnium silicate nanocrystal memory for the first time using a very simple sol-gel-spincoating method and 900 degrees C 1-min rapid thermal annealing (RTA). From the TEM identification, the nanocrystals are formed as the charge trapping layer after 900 degrees C 1-min RTA and the size is about 5 mn. They demonstrate the composition of nanocrystal is hafnium silicate from the X-ray-photoelectron-spectroscopy analysis. They verify the electric properties in terms of program/erase (P/E) speed, charge retention, and endurance. The sol-gel device exhibits the long charge retention time of 10(4) s with only 6% charge loss, and good endurance performance for P/E cycles up to 10(5).