Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride
| dc.citation.epage | 2190 | en_US |
| dc.citation.issue | 13-14 | en_US |
| dc.citation.spage | 2187 | en_US |
| dc.citation.volume | 17 | en_US |
| dc.citation.woscount | 31 | |
| dc.contributor.author | Chiu, HT | en_US |
| dc.contributor.author | Chuang, SH | en_US |
| dc.contributor.author | Tsai, CE | en_US |
| dc.contributor.author | Lee, GH | en_US |
| dc.contributor.author | Peng, SM | en_US |
| dc.contributor.department | 應用化學系 | zh_TW |
| dc.contributor.department | Department of Applied Chemistry | en_US |
| dc.date.accessioned | 2014-12-08T15:01:11Z | |
| dc.date.available | 2014-12-08T15:01:11Z | |
| dc.date.issued | 1998 | en_US |
| dc.description.abstract | New single-source precursor to tantalum nitride thin films, ((BuN)-N-t)Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr-n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes (R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The structure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallography. (C) 1998 Elsevier-Science Ltd. All rights reserved. | en_US |
| dc.identifier.issn | 0277-5387 | en_US |
| dc.identifier.journal | POLYHEDRON | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/85 | |
| dc.identifier.wosnumber | WOS:000074378200007 | |
| dc.language.iso | en_US | en_US |
| dc.subject | organoimide complexes | en_US |
| dc.subject | tantalum complexes | en_US |
| dc.subject | CVD precursors | en_US |
| dc.title | Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride | en_US |
| dc.type | Article | en_US |