A quantum trap MONOS memory device using AlN

Abstract

We report a IrO2-HfAlO-AlN-SiO2-Si MONOS device that displays excellent characteristics in terms of speed (100 mu s at +/- 13 V for program/erase) and memory window (3.7 V) at 85 degrees C operation. This device also shows good 10-year extrapolated data retention with a large 1.9 V window at 85 degrees C. The achieved performance compares well with the best reported memory device data. (c) 2006 The Electrochemical Society.