Use of a high-work-function ni electrode to improve the stress reliability of Analog SrTiO3 metal-insulator-metal capacitors
| dc.citation.epage | 696 | en_US |
| dc.citation.issue | 8 | en_US |
| dc.citation.spage | 694 | en_US |
| dc.citation.volume | 28 | en_US |
| dc.citation.woscount | 20 | |
| dc.contributor.author | Chiang, K. C. | en_US |
| dc.contributor.author | Cheng, C. H. | en_US |
| dc.contributor.author | Jhou, K. Y. | en_US |
| dc.contributor.author | Pan, H. C. | en_US |
| dc.contributor.author | Hsiao, C. N. | en_US |
| dc.contributor.author | Chou, C. P. | en_US |
| dc.contributor.author | McAlister, S. P. | en_US |
| dc.contributor.author | Chin, Albert | en_US |
| dc.contributor.author | Hwang, H. L. | en_US |
| dc.contributor.department | 機械工程學系 | zh_TW |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Mechanical Engineering | en_US |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:13:35Z | |
| dc.date.available | 2014-12-08T15:13:35Z | |
| dc.date.issued | 2007-08-01 | en_US |
| dc.description.abstract | We have studied the stress reliability of low-energy-bandgap high-kappa. SrTiO3 metal-insulator-metal capacitors under constant voltage stress. By using a high-work-function Ni electrode (5.1 eV), we reduced the degrading effects of stress on the capacitance variation (Delta C/C), the quadratic voltage coefficient of capacitance (VCC-alpha), and the long-term reliability, in contrast with using a TaN. The improved stress reliability for the Ni electrode capacitors is attributed to a reduction of carrier injection and trapping. | en_US |
| dc.identifier.doi | 10.1109/LED.2007.900876 | en_US |
| dc.identifier.issn | 0741-3106 | en_US |
| dc.identifier.journal | IEEE ELECTRON DEVICE LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/LED.2007.900876 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/10488 | |
| dc.identifier.wosnumber | WOS:000248315400009 | |
| dc.language.iso | en_US | en_US |
| dc.subject | high work function | en_US |
| dc.subject | metal-insulator-metal (MIM) | en_US |
| dc.subject | Ni | en_US |
| dc.subject | reliability | en_US |
| dc.subject | SrTiO3 (STO) | en_US |
| dc.title | Use of a high-work-function ni electrode to improve the stress reliability of Analog SrTiO3 metal-insulator-metal capacitors | en_US |
| dc.type | Article | en_US |