Light Enhancement of Silicon-Nanocrystal-Embedded SiO(x) Film on Silicon-on-Insulator Substrate

Abstract

We reported the light enhancement from a silicon-nanocrystal-embedded SiO(x) film on a silicon-on-insulator (SOI) substrate in the visible light range. The light emission from the annealed SiO(x) film is one order stronger than the emission from a nonannealed SiO(x) film. Compared with the SiO(x) film on a Si substrate, two-fold enhancement in light emission from the SiO(x) film on a SOI substrate was also observed. The enhancement was attributed to better vertical confinement of optical field in the SiO(x) film on a SOI substrate. (C) 2011 The Japan Society of Applied Physics