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公開日期標題作者
1-十一月-2016Cleaning methodology of small residue defect with surfactant in copper chemical mechanical polishing post-cleaningWei, Kuo-Hsiu; Hung, Chi-Cheng; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-十一月-2016Cleaning methodology of small residue defect with surfactant in copper chemical mechanical polishing post-cleaningWei, Kuo-Hsiu; Hung, Chi-Cheng; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-一月-2010Effect of Cu-Ion Concentration in Concentrated H(3)PO(4) Electrolyte on Cu Electrochemical Mechanical PlanarizationKung, Te-Ming; Liu, Chuan-Pu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-一月-2010Effect of Cu-Ion Concentration in Concentrated H3PO4 Electrolyte on Cu Electrochemical Mechanical PlanarizationKung, Te-Ming; Liu, Chuan-Pu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-三月-2012Effect of Electric Potential and Mechanical Force on Copper Electro-Chemical Mechanical PlanarizationChen, Sheng-Wen; Kung, Te-Ming; Liu, Chuan-Pu; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
15-一月-2013How tantalum proceeds phase change on tantalum nitride underlayer with sequential Ar plasma treatmentTsao, Jung-Chih; Liu, Chuan-Pu; Fang, Hsin-Chiao; Wang, Ying-Lang; 光電學院; College of Photonics
1-九月-2013The influence of abrasive particle size in copper chemical mechanical planarizationWei, Kuo-Hsiu; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang; Cheng, Yi-Lung; 光電學院; College of Photonics
1-十一月-2010Microstructure and Formation of Copper Oxide in the Cu Electro-Polishing ProcessKung, Te-Ming; Huang, Michael Rong-Shie; Tsao, Jung-Chih; Liu, Chuan-Pu; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-十一月-2016Preface: the Biennial TACT International Thin Films Conference (TACT 2015)Huang, Jia-Hong; Chang, Li; Chu, Jinn P.; Huang, Bohr-Ran; Hsieh, Jang-Hsing; Lin, Ming-Tzer; Liu, Chuan-Pu; Ting, Jyh-Ming; Wu, Jih-Jen; Shen, Yu-Lin; Wong, Ming-Show; Yang, Yung-Chin; 交大名義發表; National Chiao Tung University
顯示 1 到 9 筆資料，總共 9 筆