| Title: | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫三：利用CVD法成長BST薄膜與特性分析(II) Growth and Characterizations of CVD BST Thin Films(II) |
| Authors: | 曾俊元 TSEUNG-YUENTSENG 國立交通大學電子工程學系 |
| Issue Date: | 2000 |
| Gov't Doc #: | NSC89-2212-E009-081 |
| URI: | http://hdl.handle.net/11536/100039 https://www.grb.gov.tw/search/planDetail?id=548932&docId=101309 |
| Appears in Collections: | Research Plans |
