| Title: | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫IV：利用CVD法成長BST薄膜與特性分析(I) Growth and Characterizations of CVD BST Thin Films (I) |
| Authors: | 曾俊元 TSEUNG-YUENTSENG 交通大學電子工程系 |
| Issue Date: | 2000 |
| Gov't Doc #: | NSC89-2212-E009-040 |
| URI: | http://hdl.handle.net/11536/91308 https://www.grb.gov.tw/search/planDetail?id=718398&docId=134744 |
| Appears in Collections: | Research Plans |
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