| Title: | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫III:利用CVD法成長BST薄膜與特性分析(III) Growth and Characterizations of CVD BST Thin Films (IⅡ) |
| Authors: | 曾俊元 TSEUNG-YUENTSENG 交通大學電子工程系 |
| Issue Date: | 2002 |
| Gov't Doc #: | NSC91-2212-E009-041 |
| URI: | http://hdl.handle.net/11536/93057 https://www.grb.gov.tw/search/planDetail?id=783009&docId=150399 |
| Appears in Collections: | Research Plans |
