標題: | Improved electrical characteristics and reliability of MILC poly-Si TFTs using fluorine-ion implantation |
作者: | Chang, Chih-Pang Wu, YewChung Sermon 材料科學與工程學系 Department of Materials Science and Engineering |
關鍵字: | fluorine-ion implantation;metal-induced lateral crystallization (MILC);polycrystalline-silicon thin-film transistors (poly-Si TFTs) |
公開日期: | 1-十一月-2007 |
摘要: | In this letter, fluorine-ion (F+) implantation was employed to improve the electrical performance of metal-induced lateral-crystallization (MILC) polycrystalline-silicon thin-film transistors (poly-Si TFTs). It was found that fluorine ions minimize effectively the trap-state density, leading to superior electrical characteristics such as high field-effect mobility, low threshold voltage, low subthreshold slope, and high ON/OFF-current ratio. F+-implanted MILC TFTs also possess high immunity against the hot-carrier stress and, thereby, exhibit better reliability than that of typical MILC TFTs. Moreover, the manufacturing processes are simple (without any additional thermal-annealing step), and compatible with typical MILC poly-Si TFT fabrication processes. |
URI: | http://dx.doi.org/10.1109/LED.2007.906803 http://hdl.handle.net/11536/10177 |
ISSN: | 0741-3106 |
DOI: | 10.1109/LED.2007.906803 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 28 |
Issue: | 11 |
起始頁: | 990 |
結束頁: | 992 |
顯示於類別: | 期刊論文 |