Ultra fast self-corrected polarization modulated ellipsometer

doi:10.1016/j.tsf.2010.12.087

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DC Field	Value	Language
dc.contributor.author	Tsai, Hsiu-Ming	en_US
dc.contributor.author	Chen, Leng-Chun	en_US
dc.contributor.author	Chao, Yu-Faye	en_US
dc.date.accessioned	2014-12-08T15:02:20Z	-
dc.date.available	2014-12-08T15:02:20Z	-
dc.date.issued	2011-02-28	en_US
dc.identifier.issn	0040-6090	en_US
dc.identifier.uri	http://dx.doi.org/10.1016/j.tsf.2010.12.087	en_US
dc.identifier.uri	http://hdl.handle.net/11536/1018	-
dc.description.abstract	A high speed self-corrected algorithm is proposed for the polarization modulated ellipsometry (PME). In this post-flight analysis, we prove that a set of optimized ellipsometric parameters (EPs) can be obtained by using the intensities at 4 specific temporal phases. The correction ability to its initial phase by this technique has been demonstrated through a twisted nematic liquid crystals (TN-LC) cell under the driving of a square wave. Furthermore, the optimal modulation amplitude in obtaining the accurate and precise set of EPs will be discussed in this work. (C) 2011 Elsevier B.V. All rights reserved.	en_US
dc.language.iso	en_US	en_US
dc.subject	Ellipsometry	en_US
dc.subject	Polarimetry	en_US
dc.subject	Photoelastic modulator	en_US
dc.title	Ultra fast self-corrected polarization modulated ellipsometer	en_US
dc.type	Article; Proceedings Paper	en_US
dc.identifier.doi	10.1016/j.tsf.2010.12.087	en_US
dc.identifier.journal	THIN SOLID FILMS	en_US
dc.citation.volume	519	en_US
dc.citation.issue	9	en_US
dc.citation.spage	2746	en_US
dc.citation.epage	2749	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000289174200039	-
Appears in Collections:	Conferences Paper

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