标题: 新颖材料开发关键核心设施计画---雷射分子束氧化物磊晶平台
A Platform to Use Laser Mbe to Fabricate Oxide Epitaxial Thn Film Heterostructure
作者: 朱英豪
Chu Ying-Hao
国立交通大学材料科学与工程学系(所)
公开日期: 2008
摘要: 本计划希望藉由雷射分子束磊晶之建立,可以快速大幅提升我国
学界与业界在氧化物磊晶研发之实力。氧化物材料具有多样之结
构特性,可以形成简单之二元氧化物,亦可形成复杂之多元氧化
物,同时包含许多特殊之优良性质,举凡超导特性、巨磁阻特性、
焦电、压电、介电、半导、导电、磁性、光性等,几乎包含所有
物理性质。氧化物电子目前正蓬勃之发展,为下一个世代之电子
元件提供另一种解决方案。计划要建立之系统雷射分子束磊晶平
台,将具有高工作气压之RHEED 來进行臨场薄膜之成长,同时将
搭配LEED 与Time Of Flight - Ion Scattering and Recoil
Spectroscopy 还有XPS,用來检测表面之结构、组成与电子态,
亦将加入Raman 又來监控降温时之相变化过程,这样的系统可以
提供氧化物磊晶薄膜技术庞大之资料库。此一磊晶成长平台一旦
建立,可以快速提升我国于氧化物磊晶成长之基础能力,可以继
续利用此平台研发新颖与新功能之材料。高品质之材料为固态物
理研究之基石,此平台建立后,可以为以量测为主之研究群,提
供样品确保其样品之品质。另外对于成长氧化物磊晶有兴趣之研
究群,这样的平台提供共同研发之机会,可以藉由计画主持人长
期之经验,快速的建立起新制程,以利其他研究群材料之快速开
发。此一平台亦提供业界快速取得多功能与高品质之氧化物磊
晶,有助于缩短业界开发新制程与元件之研发时间,同时间由于
各种氧化物搭配,亦可由此一平台提供,亦可提供业界元件制程
与整合所遇到困难之解决方案。
Oxide materials are gifted systems, providing a variety of physical properties,
including superconducting, ferroelectric, piezoelectric, magnetic, CMR,
optical, conducting and et al. The combinations of these properties provide
new solutions of next-generation electron devices. The goal of this project
is to build up a laser molecule beam epitaxy (MBE) system to fabricate epitaxial
oxide heterostructures. Because it has the advantages of high quality epitaxial
growth, fast optimization, and good composition and interface control, it has
been a core technology on developing oxide heterostructures for many years.
Such a platform will greatly promote the ability of studying oxide electronics
in academia and industry. The laser MBE proposed here will combine high pressure
RHEED to in-situ monitor the growth of oxide films, will also combine LEED,
Time of Flight – ion scattering and recoil spectroscopy, and XPS to study the
surface structure, termination of surface, and surface compositions,
respectively. Moreover, in-situ Raman will also be included to control the phase
transformation during the cooling process. Such a system will help us to build
up a database for oxide epitaxial growth and to understand the fundamental
physics in behind. Such a platform can be used to develop new functional oxide
materials and heterostructures. It can also be used to provide high-quality
epitaxial oxide films for research groups to do other detail measurements. It
can also be used as a platform for industry to develop new oxide devices. It
will be an efficient approach to integrate research energy in academia and
industry.
官方说明文件#: NSC97-3114-M009-001
URI: http://hdl.handle.net/11536/101919
https://www.grb.gov.tw/search/planDetail?id=1672302&docId=287440
显示于类别:Research Plans


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