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dc.contributor.authorWu, Liang-Chiehen_US
dc.contributor.authorChang, Kow-Mingen_US
dc.date.accessioned2014-12-08T15:13:18Z-
dc.date.available2014-12-08T15:13:18Z-
dc.date.issued2007-10-01en_US
dc.identifier.issn0093-6413en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.mechrescom.2007.07.005en_US
dc.identifier.urihttp://hdl.handle.net/11536/10273-
dc.description.abstractThis paper presents a theoretical thermoelastic coupled model for a thermal bimorph actuator driven by a harmonically varying thermal load in micro-electro-mechanical systems. The thermoelastic coupling, which arises from the coupling of the strain rate to the temperature field of the heat transport, is considered in this model. The frequency responses are simulated using the theorem of eigenmode expansion. The effects of thermoelastic coupling on the resonant frequency and the quality factor Q for each eigenmode resonance of the deflection are calculated and compared with the same effects resulted from air damping. It shows that for the example of an aluminum-polysilicon thermal bimorph actuator, the resonant frequencies are generally shifted downward with the order larger than that of air damping, whereas the influence of thermoelastic coupling on the Q is more significant than that of air damping under high vacuum level. (c) 2007 Elsevier Ltd. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectthermal bimorph actuatoren_US
dc.subjectthermoelastic couplingen_US
dc.subjecteigenmode expansionen_US
dc.subjectquality factoren_US
dc.titleThermoelastic coupled modeling for a thermal bimorph actuatoren_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.mechrescom.2007.07.005en_US
dc.identifier.journalMECHANICS RESEARCH COMMUNICATIONSen_US
dc.citation.volume34en_US
dc.citation.issue7-8en_US
dc.citation.spage553en_US
dc.citation.epage560en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000251478200007-
dc.citation.woscount1-
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