Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 曲新生 | en_US |
| dc.contributor.author | CHU, HSIN-SEN | en_US |
| dc.date.accessioned | 2014-12-13T10:51:53Z | - |
| dc.date.available | 2014-12-13T10:51:53Z | - |
| dc.date.issued | 2000 | en_US |
| dc.identifier.govdoc | NSC89-2212-E009-080 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/102980 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=549699&docId=101498 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫二：BST 介電薄膜在12吋矽晶圓上快速熱回火製程中熱物理性質及熱應力之研究(II) | zh_TW |
| dc.title | Study on the Thermal Properties and Stresses of a 12-inches Silicon Wafer with High-dielectric BST Thin Films in Rapid Thermal Processing/Annealing(II) | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學機械工程研究所 | zh_TW |
| Appears in Collections: | Research Plans | |
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