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dc.contributor.authorZan Hsiao-Wenen_US
dc.contributor.authorMeng Hsin-Feien_US
dc.contributor.authorDai Ming-Zhien_US
dc.contributor.authorChao Yu-Chiangen_US
dc.date.accessioned2014-12-16T06:13:47Z-
dc.date.available2014-12-16T06:13:47Z-
dc.date.issued2014-11-04en_US
dc.identifier.govdocG01R019/00zh_TW
dc.identifier.govdocH01L029/08zh_TW
dc.identifier.govdocH01L029/04zh_TW
dc.identifier.govdocG01N033/543zh_TW
dc.identifier.govdocH01L051/05zh_TW
dc.identifier.govdocG01N027/327zh_TW
dc.identifier.govdocG01N027/414zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/104330-
dc.description.abstractThe present invention provides a vertical type sensor, including a substrate; a first electrode formed on the substrate; a sensing layer formed on the first electrode layer and reactive to a target substance, wherein the first electrode layer is interposed between the substrate and the sensing layer; and a second electrode layer formed on the sensing layer and having a plurality of openings, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer, and the target substance contacts the sensing layer via the plurality of openings. The vertical type sensor of the present invention provides instant, sensitive and rapid detection.zh_TW
dc.language.isozh_TWen_US
dc.titleMethod for forming vertical type sensorzh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber08877535zh_TW
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