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dc.contributor.authorLee, Chi-Hungen_US
dc.contributor.authorChiu, Yien_US
dc.contributor.authorShieh, Han-Ping D.en_US
dc.date.accessioned2014-12-08T15:13:34Z-
dc.date.available2014-12-08T15:13:34Z-
dc.date.issued2007-08-01en_US
dc.identifier.issn0091-3286en_US
dc.identifier.urihttp://dx.doi.org/10.1117/1.2769362en_US
dc.identifier.urihttp://hdl.handle.net/11536/10474-
dc.description.abstractA pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%. (c) 2007 Society of Photo-Optical Instrumentation Engineers.en_US
dc.language.isoen_USen_US
dc.subjectbinary-phase gratingen_US
dc.subjectpolarization beamsplitteren_US
dc.subjectdiffraction efficiency ratioen_US
dc.subjectsilicon nitrideen_US
dc.subjectoptical pickupen_US
dc.titleBinary-phase micrograting and polarization beamsplitter for free-space micro-optical pickupsen_US
dc.typeArticleen_US
dc.identifier.doi10.1117/1.2769362en_US
dc.identifier.journalOPTICAL ENGINEERINGen_US
dc.citation.volume46en_US
dc.citation.issue8en_US
dc.citation.epageen_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.department顯示科技研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.contributor.departmentInstitute of Displayen_US
dc.identifier.wosnumberWOS:000250200800013-
dc.citation.woscount0-
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