完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lee, Chi-Hung | en_US |
dc.contributor.author | Chiu, Yi | en_US |
dc.contributor.author | Shieh, Han-Ping D. | en_US |
dc.date.accessioned | 2014-12-08T15:13:34Z | - |
dc.date.available | 2014-12-08T15:13:34Z | - |
dc.date.issued | 2007-08-01 | en_US |
dc.identifier.issn | 0091-3286 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1117/1.2769362 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/10474 | - |
dc.description.abstract | A pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%. (c) 2007 Society of Photo-Optical Instrumentation Engineers. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | binary-phase grating | en_US |
dc.subject | polarization beamsplitter | en_US |
dc.subject | diffraction efficiency ratio | en_US |
dc.subject | silicon nitride | en_US |
dc.subject | optical pickup | en_US |
dc.title | Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1117/1.2769362 | en_US |
dc.identifier.journal | OPTICAL ENGINEERING | en_US |
dc.citation.volume | 46 | en_US |
dc.citation.issue | 8 | en_US |
dc.citation.epage | en_US | |
dc.contributor.department | 電控工程研究所 | zh_TW |
dc.contributor.department | 光電工程學系 | zh_TW |
dc.contributor.department | 顯示科技研究所 | zh_TW |
dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
dc.contributor.department | Department of Photonics | en_US |
dc.contributor.department | Institute of Display | en_US |
dc.identifier.wosnumber | WOS:000250200800013 | - |
dc.citation.woscount | 0 | - |
顯示於類別: | 期刊論文 |