標題: | Cu-metalized compound semiconductor device |
作者: | Chang Edward Yi Chang Shang-Wen Lee Cheng-Shih |
公開日期: | 2-Sep-2008 |
摘要: | The present invention is a compound semiconductor device characterized in that it is Cu-metalized to improved the reliability of the device and to greatly reduce the cost of production. |
官方說明文件#: | H01L023/48 H01L029/40 H01L021/02 H01L023/52 H01L029/66 |
URI: | http://hdl.handle.net/11536/104763 |
專利國: | USA |
專利號碼: | 07420227 |
Appears in Collections: | Patents |
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